We work closely with you to choose the thin film deposition components—from chambers through to control systems—that together meet your most demanding coating needs. Large-area systems for flat or multi-dimensional substrates. Our deposition sources and power supplies are selected for optimal film smoothness, density, and adhesion. Our thin film deposition systems include Dynavac-designed control systems customized for your unique requirements. A wide selection of substrate tooling and heating choices are available. We also design innovative custom tooling, heating, and material handling solutions.
New second edition of the popular book on deposition first edition by Klaus Schruegraf for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace.
Choose products to compare anywhere you see 'Add to Compare' or 'Compare' options displayed. In semiconductor device manufacture the following deposition technologies along with their commonly used acronyms are:. They incorporate field proven, high concentration, ultra-clean ozone generation technology as well as integrated ozone concentration monitor, flow control, and power distribution. Safety monitors, status indicator, and ozone destruct are available on some models.